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Imec, Cadence Complete Tapeout of First 5nm Test Chip

Frst tapeout of a 5nm test chip using extreme UV as well as 193 immersion lithography.

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By: DAVID SAVASTANO

Contributing Editor, Coatings World and Ink World, Coatings World and Ink World Magazine

Imec and Cadence Design Systems, Inc. completed the first tapeout of a 5nm test chip using extreme ultraviolet (EUV) as well as 193 immersion (193i) lithography. To produce this test chip, imec and Cadence optimized design rules, libraries and place-and-route technology to obtain optimal power, performance and area (PPA) scaling via Cadence Innovus Implementation System.
 
Using a processor design, imec and Cadence successfully taped out a set of designs using EUV lithography as well as Self-Aligned Quadruple Patterning (SAQP) for 193i lithography, where metal pitches were scaled from the nominal 32nm pitch down to 24nm to push the limit of patterning.
 
“Our collaboration with Cadence plays an important part in the development of the world’s most advanced geometries including 5nm and below,” said An Steegen, SVP of process technology at imec. “

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